Àº¼º ȨÆäÀÌÁö·Î À̵¿
 
 
  - 100% Ãʱؼ¼»ç ´ÏÆ®Á¦Ç° (Æú¸®¿¡½ºÅ׸£/Æú¸®¾Æ¸¶À̵å = 75/25)
   (°í¹Ðµµ °í¼öÃà °¡°ø)
  - 4¸é ÃÊÀ½ÆÄ ŰÆÃ & ½Ç¸µ 󸮷ΠÆÄƼŬ Á¦¾î
- ¶Ù¾î³­ Èí¼ö¼º
- Á¤Àü±â ¹ß»ý Á¦¾î
- ÀÌ¿Â, NVRÁ¦¾î
- Class 1 cleanroom¿¡¼­ ¼¼Å¹ & Æ÷Àå Á¦Ç°
  - Class 1-10 Ŭ¸°·ë¿¡¼­ »ç¿ë
- °íÁýÀû ¹ÝµµÃ¼ °øÁ¤, TFT-LCDÁ¦Á¶ °øÁ¤,
  ¹ÝµµÃ¼ Àåºñ ûÁ¤ À¯Áö¿ë, ±Õ½Ç À¯Áö¿ë
- Á¤¹Ð±â±â Á¶¸³ °øÁ¤½Ã
 
Particle Count(>0.5§­/cft)
1.3 X 10©ù
Absorbency (%)
307
Capacity(§¢/§³)
655
Efficiency(§¢/g)
3.07
Time to maxi. sorption(sec)
14
Non Volatile Residue(g/§³)
DI water
0.011
IPA
0.02
Extractables(PPM)
K
0.03
Fe
ND
Na
0.21
Cl
0.013
Ca
0.1
Mg
0.14

  - 100% Ãʱؼ¼»ç ´ÏÆ®Á¦Ç° (Æú¸®¿¡½ºÅ׸£/Æú¸®¾Æ¸¶À̵å = 75/25)
  - 4¸é ÃÊÀ½ÆÄ ŰÆÃ & ½Ç¸µ 󸮷ΠÆÄƼŬ Á¦¾î
- ¶Ù¾î³­ Èí¼ö¼º
- Á¤Àü±â ¹ß»ý Á¦¾î
- ÀÌ¿Â, NVRÁ¦¾î
- Class 1 cleanroom¿¡¼­ ¼¼Å¹ & Æ÷Àå Á¦Ç°
  - Class 1-10 Ŭ¸°·ë¿¡¼­ »ç¿ë
- °íÁýÀû ¹ÝµµÃ¼ °øÁ¤, TFT-LCDÁ¦Á¶ °øÁ¤,
  ¹ÝµµÃ¼ Àåºñ ûÁ¤ À¯Áö¿ë, ¹«±Õ½Ç
- Á¤¹Ð±â±â Á¶¸³ °øÁ¤½Ã
 
Particle Count(>0.5§­/cft)
3.6 X 10©ù
Absorbency (%)
300
Capacity(§¢/§³)
471
Efficiency(§¢/g)
3
Time to sorption(sec)
56
Non Volatile Residue(g/§³)
DI water
0.014
IPA
0.025
Extractables(PPM/0.1m2)
K
0.06
Fe
ND
Na
0.23
Cl
0.023
Ca
0.14
Mg
0.24

  - 100% Ãʱؼ¼»ç ´ÏÆ®Á¦Ç° (Æú¸®¿¡½ºÅ׸£/Æú¸®¾Æ¸¶À̵å = 75/25)
  - 4¸é ÃÊÀ½ÆÄ ŰÆÃ & ½Ç¸µ 󸮷ΠÆÄƼŬ Á¦¾î
- ¶Ù¾î³­ Èí¼ö¼º
- Ư¼ö Á¶Á÷À¸·Î ¶Ù¾î³­ ´ÛÀ½¼º
- Á¤Àü±â ¹ß»ý Á¦¾î
- ÀÌ¿Â, NVRÁ¦¾î
- Class 1 cleanroom¿¡¼­ ¼¼Å¹ & Æ÷Àå Á¦Ç°
  - Class 1-10 Ŭ¸°·ë¿¡¼­ »ç¿ë
- °íÁýÀû ¹ÝµµÃ¼ °øÁ¤, TFT-LCDÁ¦Á¶ °øÁ¤,
  ¹ÝµµÃ¼ Àåºñ ûÁ¤ À¯Áö¿ë, ¹«±Õ½Ç
- Á¤¹Ð±â±â Á¶¸³ °øÁ¤½Ã
 
Particle Count(>0.5§­/cft)
2.9 X 10©ù
Absorbency (%)
264
Capacity(§¢/§³)
348
Efficiency(§¢/g)
2.64
Time to maxi. sorption(sec)
63
Non Volatile Residue(g/§³)
DI water
0.08
IPA
0.07
Extractables(PPM)
K
0.415
Fe
ND
Na
0.051
Cl
0.44
Ca
0.029
Mg
ND

  - 100% Ãʱؼ¼»ç ´ÏÆ®Á¦Ç° (Æú¸®¿¡½ºÅ׸£/Æú¸®¾Æ¸¶À̵å = 75/25)
  - 4¸é ÃÊÀ½ÆÄ ŰÆÃ & ½Ç¸µ 󸮷ΠÆÄƼŬ Á¦¾î
- ¶Ù¾î³­ Èí¼ö¼º
- Á¤Àü±â ¹ß»ý Á¦¾î
- ÀÌ¿Â, NVRÁ¦¾î
- Class 1 cleanroom¿¡¼­ ¼¼Å¹ & Æ÷Àå Á¦Ç°
  - Class 1-10 Ŭ¸°·ë¿¡¼­ »ç¿ë
- °íÁýÀû ¹ÝµµÃ¼ °øÁ¤, TFT-LCDÁ¦Á¶ °øÁ¤,
  ¹ÝµµÃ¼ Àåºñ ûÁ¤ À¯Áö¿ë, ¹«±Õ½Ç
- Á¤¹Ð±â±â Á¶¸³ °øÁ¤½Ã
 
Particle Count(>0.5§­/cft)
4.1 X 10©ù
Absorbency (%)
257
Capacity(§¢/§³)
524
Efficiency(§¢/g)
2.57
Time to maxi. sorption(sec)
102
Non Volatile Residue(g/§³)
DI water
0.07
IPA
0.143
Extractables(PPM)
K
0.415
Fe
ND
Na
0.056
Cl
0.32
Ca
0.035
Mg
0.28

  - 100% Ãʱؼ¼»ç ´ÏÆ®Á¦Ç° (Æú¸®¿¡½ºÅ׸£/Æú¸®¾Æ¸¶À̵å = 75/25)
  - 4¸é ÃÊÀ½ÆÄ ŰÆÃ & ½Ç¸µ 󸮷ΠÆÄƼŬ Á¦¾î
- ¶Ù¾î³­ Èí¼ö¼º
- Ư¼ö Á¶Á÷À¸·Î ¶Ù¾î³­ ´ÛÀ½¼º
- Á¤Àü±â ¹ß»ý Á¦¾î
- ÀÌ¿Â, NVRÁ¦¾î
- Class 1 cleanroom¿¡¼­ ¼¼Å¹ & Æ÷Àå Á¦Ç°
  - Class 1-10 Ŭ¸°·ë¿¡¼­ »ç¿ë
- °íÁýÀû ¹ÝµµÃ¼ °øÁ¤, TFT-LCDÁ¦Á¶ °øÁ¤,
  ¹ÝµµÃ¼ Àåºñ ûÁ¤ À¯Áö¿ë, ¹«±Õ½Ç
- Á¤¹Ð±â±â Á¶¸³ °øÁ¤½Ã
 
Particle Count(>0.5§­/cft)
4.5 X 10©ù
Absorbency (%)
271
Capacity(§¢/§³)
582
Efficiency(§¢/g)
2.71
Time to sorption(sec)
51
Non Volatile Residue(g/§³)
DI water
0.09
IPA
0.194
Extractables(PPM)
K
0.105
Fe
0.005
Na
0.695
Cl
0.065
Ca
0.4
Mg
ND

  - 100% Ãʱؼ¼»ç ´ÏÆ®Á¦Ç° (Æú¸®¿¡½ºÅ׸£/Æú¸®¾Æ¸¶À̵å = 75/25)
  - 4¸é ÃÊÀ½ÆÄ ŰÆÃ & ½Ç¸µ 󸮷ΠÆÄƼŬ Á¦¾î
- ¶Ù¾î³­ Èí¼ö¼º
- Á¤Àü±â ¹ß»ý Á¦¾î
- ÀÌ¿Â, NVRÁ¦¾î
- Class 1 cleanroom¿¡¼­ ¼¼Å¹ & Æ÷Àå Á¦Ç°
  - Class 1-10 Ŭ¸°·ë¿¡¼­ »ç¿ë
- °íÁýÀû ¹ÝµµÃ¼ °øÁ¤, TFT-LCDÁ¦Á¶ °øÁ¤,
  ¹ÝµµÃ¼ Àåºñ ûÁ¤ À¯Áö¿ë, ¹«±Õ½Ç
- Á¤¹Ð±â±â Á¶¸³ °øÁ¤½Ã
 
Particle Count(>0.5§­/cft)
3.7 X 10©ù
Absorbency (%)
227
Capacity(§¢/§³)
478
Efficiency(§¢/g)
2.27
Time to maxi. sorption(sec)
39
Non Volatile Residue(g/§³)
DI water
0.03
IPA
0.04
Extractables(PPM)
K
0.065
Fe
0.005
Na
0.246
Cl
0.033
Ca
0.035
Mg
ND

  - 100% Àå¼¶À¯ Æú¸®¿¡½ºÅ׸£ ´ÏÆ® Á¦Ç°
  - 4¸é ÃÊÀ½ÆÄ ŰÆÃ & ½Ç¸µ 󸮷ΠÆÄƼŬ Á¦¾î
- Àú ¹ßÁø¼º
- ¶Ù¾î³­ Èí¼ö¼º
- Á¤Àü±â ¹ß»ý Á¦¾î
- ÀÌ¿Â, NVRÁ¦¾î
- Class 1 cleanroom¿¡¼­ ¼¼Å¹ & Æ÷Àå Á¦Ç°
  - Class 10-100 Ŭ¸°·ë¿¡¼­ »ç¿ë
- °íÁýÀû ¹ÝµµÃ¼ °øÁ¤, TFT-LCDÁ¦Á¶ °øÁ¤,
  ¹ÝµµÃ¼ Àåºñ ûÁ¤ À¯Áö¿ë, ¹«±Õ½Ç
- Á¤¹Ð±â±â Á¶¸³ °øÁ¤½Ã
 
Particle Count(>0.5§­/cft)
5.7 X 10©ù
Absorbency (%)
332
Capacity(§¢/§³)
476
Efficiency(§¢/g)
3.32
Time to maxi. sorption(sec)
68
Non Volatile Residue(g/§³)
DI water
0.002
IPA
0.053
Extractables(PPM)
K
0.027
Fe
0.005
Na
0.28
Cl
0.17
Ca
0.205
Mg
0.3

  - 100% Àå¼¶À¯ Æú¸®¿¡½ºÅ׸£ ´ÏÆ® Á¦Ç°
  - 4¸é ÃÊÀ½ÆÄ ŰÆÃ & ½Ç¸µ 󸮷ΠÆÄƼŬ Á¦¾î
- ¶Ù¾î³­ Èí¼ö¼º
- Á¤Àü±â ¹ß»ý Á¦¾î
- Ư¼ö Á¶Á÷À¸·Î ¶Ù¾î³­ ´ÛÀ½¼º
- ÀÌ¿Â, NVRÁ¦¾î
- Class 1 cleanroom¿¡¼­ ¼¼Å¹ & Æ÷Àå Á¦Ç°
  - Class 10-100 Ŭ¸°·ë¿¡¼­ »ç¿ë.
- °íÁýÀû ¹ÝµµÃ¼ °øÁ¤, TFT-LCDÁ¦Á¶ °øÁ¤,
  ¹ÝµµÃ¼ Àåºñ ûÁ¤ À¯Áö¿ë, ¹«±Õ½Ç
- Á¤¹Ð±â±â Á¶¸³ °øÁ¤½Ã
 
Particle Count(>0.5§­/cft)
5.9 X 10©ù
Absorbency (%)
332
Capacity(§¢/§³)
569
Efficiency(§¢/g)
3.32
Time to maxi. sorption(sec)
54
Non Volatile Residue(g/§³)
DI water
0.018
IPA
0.057
Extractables(PPM)
K
0.029
Fe
0.01
Na
0.111
Cl
0.05
Ca
0.073
Mg
ND