| |
|
 |
|
|
|
 |
| |
- 100% Ãʱؼ¼»ç ´ÏÆ®Á¦Ç° (Æú¸®¿¡½ºÅ׸£/Æú¸®¾Æ¸¶À̵å = 75/25)
(°í¹Ðµµ °í¼öÃà °¡°ø) |
 |
| |
- 4¸é ÃÊÀ½ÆÄ ŰÆÃ &
½Ç¸µ 󸮷ΠÆÄƼŬ Á¦¾î
- ¶Ù¾î³ Èí¼ö¼º
- Á¤Àü±â ¹ß»ý Á¦¾î
- ÀÌ¿Â, NVRÁ¦¾î
- Class 1 cleanroom¿¡¼ ¼¼Å¹ & Æ÷Àå Á¦Ç° |
 |
| |
- Class 1-10 Ŭ¸°·ë¿¡¼
»ç¿ë
- °íÁýÀû ¹ÝµµÃ¼ °øÁ¤, TFT-LCDÁ¦Á¶ °øÁ¤,
¹ÝµµÃ¼ Àåºñ ûÁ¤ À¯Áö¿ë, ±Õ½Ç À¯Áö¿ë
- Á¤¹Ð±â±â Á¶¸³ °øÁ¤½Ã |
 |
| |
|
|
|
|
Particle
Count(>0.5§/cft)
|
1.3 X 10©ù
|
|
Absorbency (%)
|
307
|
|
Capacity(§¢/§³)
|
655
|
|
Efficiency(§¢/g)
|
3.07
|
|
Time to
maxi. sorption(sec)
|
14
|
|
Non Volatile Residue(g/§³)
|
|
|
DI water
|
0.011
|
|
IPA
|
0.02
|
|
Extractables(PPM)
|
|
|
K
|
0.03
|
|
Fe
|
ND
|
|
Na
|
0.21
|
|
Cl
|
0.013
|
|
Ca
|
0.1
|
|
Mg
|
0.14
|
|
|
|
|
 |
|
|
|
 |
| |
- 100% Ãʱؼ¼»ç ´ÏÆ®Á¦Ç° (Æú¸®¿¡½ºÅ׸£/Æú¸®¾Æ¸¶À̵å = 75/25) |
 |
| |
- 4¸é ÃÊÀ½ÆÄ ŰÆÃ &
½Ç¸µ 󸮷ΠÆÄƼŬ Á¦¾î
- ¶Ù¾î³ Èí¼ö¼º
- Á¤Àü±â ¹ß»ý Á¦¾î
- ÀÌ¿Â, NVRÁ¦¾î
- Class 1 cleanroom¿¡¼ ¼¼Å¹ & Æ÷Àå Á¦Ç° |
 |
| |
- Class 1-10 Ŭ¸°·ë¿¡¼
»ç¿ë
- °íÁýÀû ¹ÝµµÃ¼ °øÁ¤, TFT-LCDÁ¦Á¶ °øÁ¤,
¹ÝµµÃ¼ Àåºñ ûÁ¤ À¯Áö¿ë, ¹«±Õ½Ç
- Á¤¹Ð±â±â Á¶¸³ °øÁ¤½Ã |
 |
| |
|
|
|
|
Particle
Count(>0.5§/cft)
|
3.6 X 10©ù
|
|
Absorbency (%)
|
300
|
|
Capacity(§¢/§³)
|
471
|
|
Efficiency(§¢/g)
|
3
|
|
Time to
sorption(sec)
|
56
|
|
Non Volatile Residue(g/§³)
|
|
|
DI water
|
0.014
|
|
IPA
|
0.025
|
|
Extractables(PPM/0.1m2)
|
|
|
K
|
0.06
|
|
Fe
|
ND
|
|
Na
|
0.23
|
|
Cl
|
0.023
|
|
Ca
|
0.14
|
|
Mg
|
0.24
|
|
|
|
|
|
|
 |
|
|
|
 |
| |
- 100% Ãʱؼ¼»ç ´ÏÆ®Á¦Ç° (Æú¸®¿¡½ºÅ׸£/Æú¸®¾Æ¸¶À̵å = 75/25) |
 |
| |
- 4¸é ÃÊÀ½ÆÄ ŰÆÃ &
½Ç¸µ 󸮷ΠÆÄƼŬ Á¦¾î
- ¶Ù¾î³ Èí¼ö¼º
- Ư¼ö Á¶Á÷À¸·Î ¶Ù¾î³ ´ÛÀ½¼º
- Á¤Àü±â ¹ß»ý Á¦¾î
- ÀÌ¿Â, NVRÁ¦¾î
- Class 1 cleanroom¿¡¼ ¼¼Å¹ & Æ÷Àå Á¦Ç° |
 |
| |
- Class 1-10 Ŭ¸°·ë¿¡¼
»ç¿ë
- °íÁýÀû ¹ÝµµÃ¼ °øÁ¤, TFT-LCDÁ¦Á¶ °øÁ¤,
¹ÝµµÃ¼ Àåºñ ûÁ¤ À¯Áö¿ë, ¹«±Õ½Ç
- Á¤¹Ð±â±â Á¶¸³ °øÁ¤½Ã |
 |
| |
|
|
|
|
Particle
Count(>0.5§/cft)
|
2.9 X 10©ù
|
|
Absorbency (%)
|
264
|
|
Capacity(§¢/§³)
|
348
|
|
Efficiency(§¢/g)
|
2.64
|
|
Time to
maxi. sorption(sec)
|
63
|
|
Non Volatile Residue(g/§³)
|
|
|
DI water
|
0.08
|
|
IPA
|
0.07
|
|
Extractables(PPM)
|
|
|
K
|
0.415
|
|
Fe
|
ND
|
|
Na
|
0.051
|
|
Cl
|
0.44
|
|
Ca
|
0.029
|
|
Mg
|
ND
|
|
|
|
|
|
|
 |
|
|
|
 |
| |
- 100% Ãʱؼ¼»ç ´ÏÆ®Á¦Ç° (Æú¸®¿¡½ºÅ׸£/Æú¸®¾Æ¸¶À̵å = 75/25) |
 |
| |
- 4¸é ÃÊÀ½ÆÄ ŰÆÃ &
½Ç¸µ 󸮷ΠÆÄƼŬ Á¦¾î
- ¶Ù¾î³ Èí¼ö¼º
- Á¤Àü±â ¹ß»ý Á¦¾î
- ÀÌ¿Â, NVRÁ¦¾î
- Class 1 cleanroom¿¡¼ ¼¼Å¹ & Æ÷Àå Á¦Ç° |
 |
| |
- Class 1-10 Ŭ¸°·ë¿¡¼
»ç¿ë
- °íÁýÀû ¹ÝµµÃ¼ °øÁ¤, TFT-LCDÁ¦Á¶ °øÁ¤,
¹ÝµµÃ¼ Àåºñ ûÁ¤ À¯Áö¿ë, ¹«±Õ½Ç
- Á¤¹Ð±â±â Á¶¸³ °øÁ¤½Ã |
 |
| |
|
|
|
|
Particle
Count(>0.5§/cft)
|
4.1 X 10©ù
|
|
Absorbency (%)
|
257
|
|
Capacity(§¢/§³)
|
524
|
|
Efficiency(§¢/g)
|
2.57
|
|
Time to
maxi. sorption(sec)
|
102
|
|
Non Volatile Residue(g/§³)
|
|
|
DI water
|
0.07
|
|
IPA
|
0.143
|
|
Extractables(PPM)
|
|
|
K
|
0.415
|
|
Fe
|
ND
|
|
Na
|
0.056
|
|
Cl
|
0.32
|
|
Ca
|
0.035
|
|
Mg
|
0.28
|
|
|
|
|
|
|
 |
|
|
|
 |
| |
- 100% Ãʱؼ¼»ç ´ÏÆ®Á¦Ç° (Æú¸®¿¡½ºÅ׸£/Æú¸®¾Æ¸¶À̵å = 75/25) |
 |
| |
- 4¸é ÃÊÀ½ÆÄ ŰÆÃ &
½Ç¸µ 󸮷ΠÆÄƼŬ Á¦¾î
- ¶Ù¾î³ Èí¼ö¼º
- Ư¼ö Á¶Á÷À¸·Î ¶Ù¾î³ ´ÛÀ½¼º
- Á¤Àü±â ¹ß»ý Á¦¾î
- ÀÌ¿Â, NVRÁ¦¾î
- Class 1 cleanroom¿¡¼ ¼¼Å¹ & Æ÷Àå Á¦Ç° |
 |
| |
- Class 1-10 Ŭ¸°·ë¿¡¼
»ç¿ë
- °íÁýÀû ¹ÝµµÃ¼ °øÁ¤, TFT-LCDÁ¦Á¶ °øÁ¤,
¹ÝµµÃ¼ Àåºñ ûÁ¤ À¯Áö¿ë, ¹«±Õ½Ç
- Á¤¹Ð±â±â Á¶¸³ °øÁ¤½Ã |
 |
| |
|
|
|
|
Particle
Count(>0.5§/cft)
|
4.5 X 10©ù
|
|
Absorbency (%)
|
271
|
|
Capacity(§¢/§³)
|
582
|
|
Efficiency(§¢/g)
|
2.71
|
|
Time to
sorption(sec)
|
51
|
|
Non Volatile Residue(g/§³)
|
|
|
DI water
|
0.09
|
|
IPA
|
0.194
|
|
Extractables(PPM)
|
|
|
K
|
0.105
|
|
Fe
|
0.005
|
|
Na
|
0.695
|
|
Cl
|
0.065
|
|
Ca
|
0.4
|
|
Mg
|
ND
|
|
|
|
|
|
|
 |
|
|
|
 |
| |
- 100% Ãʱؼ¼»ç ´ÏÆ®Á¦Ç° (Æú¸®¿¡½ºÅ׸£/Æú¸®¾Æ¸¶À̵å = 75/25) |
 |
| |
- 4¸é ÃÊÀ½ÆÄ ŰÆÃ &
½Ç¸µ 󸮷ΠÆÄƼŬ Á¦¾î
- ¶Ù¾î³ Èí¼ö¼º
- Á¤Àü±â ¹ß»ý Á¦¾î
- ÀÌ¿Â, NVRÁ¦¾î
- Class 1 cleanroom¿¡¼ ¼¼Å¹ & Æ÷Àå Á¦Ç° |
 |
| |
- Class 1-10 Ŭ¸°·ë¿¡¼
»ç¿ë
- °íÁýÀû ¹ÝµµÃ¼ °øÁ¤, TFT-LCDÁ¦Á¶ °øÁ¤,
¹ÝµµÃ¼ Àåºñ ûÁ¤ À¯Áö¿ë, ¹«±Õ½Ç
- Á¤¹Ð±â±â Á¶¸³ °øÁ¤½Ã |
 |
| |
|
|
|
|
Particle
Count(>0.5§/cft)
|
3.7 X 10©ù
|
|
Absorbency (%)
|
227
|
|
Capacity(§¢/§³)
|
478
|
|
Efficiency(§¢/g)
|
2.27
|
|
Time to
maxi. sorption(sec)
|
39
|
|
Non Volatile Residue(g/§³)
|
|
|
DI water
|
0.03
|
|
IPA
|
0.04
|
|
Extractables(PPM)
|
|
|
K
|
0.065
|
|
Fe
|
0.005
|
|
Na
|
0.246
|
|
Cl
|
0.033
|
|
Ca
|
0.035
|
|
Mg
|
ND
|
|
|
|
|
|
|
 |
|
|
|
 |
| |
- 100% Àå¼¶À¯ Æú¸®¿¡½ºÅ׸£
´ÏÆ® Á¦Ç° |
 |
| |
- 4¸é ÃÊÀ½ÆÄ ŰÆÃ &
½Ç¸µ 󸮷ΠÆÄƼŬ Á¦¾î
- Àú ¹ßÁø¼º
- ¶Ù¾î³ Èí¼ö¼º
- Á¤Àü±â ¹ß»ý Á¦¾î
- ÀÌ¿Â, NVRÁ¦¾î
- Class 1 cleanroom¿¡¼ ¼¼Å¹ & Æ÷Àå Á¦Ç° |
 |
| |
- Class 10-100 Ŭ¸°·ë¿¡¼
»ç¿ë
- °íÁýÀû ¹ÝµµÃ¼ °øÁ¤, TFT-LCDÁ¦Á¶ °øÁ¤,
¹ÝµµÃ¼ Àåºñ ûÁ¤ À¯Áö¿ë, ¹«±Õ½Ç
- Á¤¹Ð±â±â Á¶¸³ °øÁ¤½Ã |
 |
| |
|
|
|
|
Particle
Count(>0.5§/cft)
|
5.7 X 10©ù
|
|
Absorbency (%)
|
332
|
|
Capacity(§¢/§³)
|
476
|
|
Efficiency(§¢/g)
|
3.32
|
|
Time to
maxi. sorption(sec)
|
68
|
|
Non Volatile Residue(g/§³)
|
|
|
DI water
|
0.002
|
|
IPA
|
0.053
|
|
Extractables(PPM)
|
|
|
K
|
0.027
|
|
Fe
|
0.005
|
|
Na
|
0.28
|
|
Cl
|
0.17
|
|
Ca
|
0.205
|
|
Mg
|
0.3
|
|
|
|
|
|
|
 |
|
|
|
 |
| |
- 100% Àå¼¶À¯ Æú¸®¿¡½ºÅ׸£
´ÏÆ® Á¦Ç° |
 |
| |
- 4¸é ÃÊÀ½ÆÄ ŰÆÃ &
½Ç¸µ 󸮷ΠÆÄƼŬ Á¦¾î
- ¶Ù¾î³ Èí¼ö¼º
- Á¤Àü±â ¹ß»ý Á¦¾î
- Ư¼ö Á¶Á÷À¸·Î ¶Ù¾î³ ´ÛÀ½¼º
- ÀÌ¿Â, NVRÁ¦¾î
- Class 1 cleanroom¿¡¼ ¼¼Å¹ & Æ÷Àå Á¦Ç° |
 |
| |
- Class 10-100 Ŭ¸°·ë¿¡¼
»ç¿ë.
- °íÁýÀû ¹ÝµµÃ¼ °øÁ¤, TFT-LCDÁ¦Á¶ °øÁ¤,
¹ÝµµÃ¼ Àåºñ ûÁ¤ À¯Áö¿ë, ¹«±Õ½Ç
- Á¤¹Ð±â±â Á¶¸³ °øÁ¤½Ã |
 |
| |
|
|
|
|
Particle
Count(>0.5§/cft)
|
5.9 X 10©ù
|
|
Absorbency (%)
|
332
|
|
Capacity(§¢/§³)
|
569
|
|
Efficiency(§¢/g)
|
3.32
|
|
Time to
maxi. sorption(sec)
|
54
|
|
Non Volatile Residue(g/§³)
|
|
|
DI water
|
0.018
|
|
IPA
|
0.057
|
|
Extractables(PPM)
|
|
|
K
|
0.029
|
|
Fe
|
0.01
|
|
Na
|
0.111
|
|
Cl
|
0.05
|
|
Ca
|
0.073
|
|
Mg
|
ND
|
|
|
|
|
|
|
|
|